{"version":"1.0","type":"rich","provider_name":"CNXT","provider_url":"https://centralbanks.app","title":"Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena","author_name":"Organization Edition","thumbnail_url":"https://centralbanks.app/api/og/share.png?h=web%2Busd%3A%2F%2Forg-crossref-issn-0734-211x&n=Journal+of+Vacuum+Science+%26+Technology+B+Microelectronics+Processing+and+Phenomena&a=blue&k=Organization+Edition&v=4","thumbnail_width":1200,"thumbnail_height":630,"width":1200,"height":630,"html":"<a href=\"https://centralbanks.app/u/web%2Busd%3A%2F%2Forg-crossref-issn-0734-211x\"><img src=\"https://centralbanks.app/api/og/share.png?h=web%2Busd%3A%2F%2Forg-crossref-issn-0734-211x&amp;n=Journal+of+Vacuum+Science+%26+Technology+B+Microelectronics+Processing+and+Phenomena&amp;a=blue&amp;k=Organization+Edition&amp;v=4\" width=\"1200\" height=\"630\" alt=\"Journal of Vacuum Science &amp; Technology B Microelectronics Processing and Phenomena — CNXT\"/></a>"}